Turbomolecular pumps
TURBOVAC
Mechanically Suspended
Reliable product range for demanding applications with discrete pump electronics.
Advantages:
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Clean and high vacuum generator
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Safe handling despite difficult operating conditions
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Long service life
Specifications:
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Pumping speed up to 1,150 l / s
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Two oil-free mechanical ceramic beds
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High-resistance versions for mechanical shocks and shock-aeration situations
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No electronic versions for radiation operations
TURBOVAC i / i
Hybrid Technology (Mechanical / Magnetic)
Innovative and flexible with high performance and integrated electronics.
Advantages:
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Clean, high and very high vacuum generator
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Long service life
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Easy to install and use
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Reliable use in a wide variety of applications and conditions
Specifications:
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Pumping speed up to 440 l / s
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Oil-free hybrid bed (mechanical / permanent magnetic)
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Many different integrated electronics options for control of connection and accessory components
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Versions with high compression and high gas output
TURBOVAC MAGiNTEGRA
Magnetically Raised
Most compact product range for industrial applications with a built-in frequency converter and power supply. Easy and space-saving system integration.
Advantages:
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Clean, high and very high vacuum generator
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Suitable for industrial applications such as PVD, coating, screen and glass coating
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Insensitive to grain and accumulation
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Low maintenance requirement
Specifications:
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High pump speed and high compression ratio for all gases
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Covering the Holweck phase
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Resistant to particles and deposits
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Insensitive to shock aeration
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Monitoring and self-protection functions
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Many processes do not require maintenance
TURBOVAC MAG digital
Magnetically Raised
Turbomolecular pumps with separate frequency converters that are flexible, vibration-free and require low maintenance.
Advantages:
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Clean, high and very high vacuum generator
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Reliability and reliability in situations where semiconductor processing is required
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Installation in any direction
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High pre-vacuum tolerance
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Long service life
Specifications:
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Pumping speed up to 3,200 l / s
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Magnetically raised.
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Compound stepped versions available.
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Constant system performance capability; high pump speed and high compression ratio for all gases
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Easy system integration
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Temperature management system
Diffusion pumps
LEYBOJET OB
Oil vapor spray pumps
Long maintenance intervals, non-abrasive, high safety standard.
Advantages:
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High vacuum
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Very high support pressure capacity
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High pump speed
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Safe and economical
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CE compliant electronic power supply
Specifications:
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Pumping speed: from 6,000 to 18,000 l / s'e
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Process range: <10 -1 denier to 10 -4 mbar
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Constant pumping speed at low pressure range
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No wear on cyclic parts
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Small footprint
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Easy operation
DIP / LEYBOJET
Diffusion Pumps
Long intervals for maintenance, non-abrasive, high safety standard
Advantages:
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Constant high vacuum
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Very high support pressure capacity
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High pump speed
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Safe and economical
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CE compliant electronic power supply
Specifications:
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Pumping speed: DIP: from 3,000 to 50,000 l / s LEYBOJET: 12,000 l / s
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Operation range: DIP: <10 -2 to 10 -7 mbar LEYBOJET: <10 -2 to 10 -5mbar
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Optimum pumping speed in the pressure range <10-4 mbar (DIP) and
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No wear on cyclic parts
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Easy operation
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Suitable for dormant process applications (LEYBOJET)
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Innovative power budget controller (ROI <2 years)
ENERGY SAVING CONTROLLERS
Power Efficiency Control Unit
Speed ROI (<2 years) with power savings of up to 30%. Easy and comfortable to use. Optimized power and oil consumption data
Advantages:
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Reduce costs by lowering energy consumption
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Easy to use
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PLC controlled
Specifications:
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Power savings up to 30%
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Improved service life for oil and protection from heat
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Easily display parameters with graphical user interface
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Connection via USB and Ethernet
